Bird RF Laboratory Sensors have been depended upon for decades to provide highly accurate power measurement of laboratory and semiconductor production processes. Ranging from the 4020 Series sensors capable of 3% accuracy and the more advanced 4027 Series sensors capable of 1% accuracy. These highly accurate sensors have also been integrated into turnkey calibration carts that integrate all the components required to measure, display and dissipate power from RF delivery systems. Even more sophisticated systems, the VIP and BDS have been developed to not only measure voltage and current but also the phase relationships between them to enable a higher degree of insight into modern, complex semiconductor processes.
Semiconductor RF delivery systems require the most accurate and precise measurement of power, whether at the output of the RF generator, or at the input to the process reactor.
Calibration Carts are suitable for use in a clean room environment and is equipped with four swivel casters for maximum maneuverability.
Precision Power Meters for Semiconductor Processing Applications